The multi-channel spectral filter has a cutting-edge spectroscopic function, which can sharply optimize the structure of imaging spectrometer spectroscopic system and apply it as a spectroscopic element in the imaging spectrometer. The miniaturization and weight reduction of the imaging spectrometer can be realized. Therefore, multi-channel filters play a significant role in miniaturized and lightweight imaging spectrometers. Multi-channel filters are different from traditional filters in that their channel size is in the order of microns (5-30 microns). Generally, multiple or combined exposures and thin-film etching methods are used to prepare the size and intermediate thicknesses of different thicknesses. The cavity layer is used to realize the regulation of the spectral channel peak position of the filter. When using this method to prepare multi-channel filters, the number of spectral channels strongly depends on the number of overlay processes.
Multi-channel filters have important applications in optical communication, satellite imaging, remote sensing hyperspectral, etc.